Mask blanks warpage at 130-nm node.
| Autor: | Deguchi, Nobuyoshi, Iwamoto, Kazunori, Tsukamoto, Izumi, Takai, Ryo, Hiura, Mitsuru |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p364-371, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Deguchi, Nobuyoshi, Iwamoto, Kazunori, Tsukamoto, Izumi, Takai, Ryo, Hiura, Mitsuru |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p364-371, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|