Focused ion beam repair for quartz bump defect of alternating phase-shift masks.
| Autor: | Kagami, Ichiro, Kakuta, Daichi, Komizo, Tooru, Kawahira, Hiroichi |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p563-573, 11p |
| Databáze: | Complementary Index |
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