Bridge structure PZT thin film microtransducer with mass loading.
| Autor: | Zang, Ming, Zurn, Shayne M., Robbins, William P., Polla, Dennis L., Markus, David T. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p152-161, 10p |
| Databáze: | Complementary Index |
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