Recent developments in spectroscopic ellipsometry for in-situ applications.
| Autor: | Johs, Blaine D., Hale, Jeff, Ianno, Natale J., Herzinger, Craig M., Tiwald, Thomas E., Woollam, John A. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p41-57, 17p |
| Databáze: | Complementary Index |
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