RF magnetron sputtering SiOx, ZnS, and Al2O3 films for capsulation of nanostructured porous silicon.
| Autor: | Monastyrskii, Liubomyr S., Kovtun, Roman M., Vlasov, Andrii P., Kostukevich, Sergii O. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p233-237, 5p |
| Databáze: | Complementary Index |
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