Gold damascene interconnect technology for millimeter-wave photonics on silicon.
| Autor: | Ishii, Hiromu, Yagi, Shouji, Minotani, Tadashi, Royter, Yakov, Kudou, Kazuhisa, Yano, Masaki, Nagatsuma, Tadao, Machida, Katsuyuki, Kyuragi, Hakaru |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p210-219, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|