Characterization of MEMS mechanical properties using nanoscale techniques.
| Autor: | Randall, Nicholas X., Soden, Richard A. J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p287-294, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Randall, Nicholas X., Soden, Richard A. J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p287-294, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|