Electromagnetic remote control and downscaling advantages and examples for MOEMS.
| Autor: | Reyne, Gilbert, Houlet, Lionel, Takahashi, Yoshifumi, Bourouina, Tarik, Fujita, Hiroyuki |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p205-215, 11p |
| Databáze: | Complementary Index |
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