Recent in-situ studies of the evolution of surfaces and interfaces of thin films by spectroscopic phase-modulated ellipsometry.
| Autor: | Yakovlev, V., Drevillon, Bernard, Layadi, Nace, Roca i Cabarrocas, Pere |
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| Zdroj: | Proceedings of SPIE; Nov1993, Issue 1, p272-282, 11p |
| Databáze: | Complementary Index |
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