In-situ spectral ellipsometry for real-time thickness measurement and control.
| Autor: | Henck, Steven A., Duncan, Walter M., Loewenstein, Lee M., Kuehne, John |
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| Zdroj: | Proceedings of SPIE; Nov1993, Issue 1, p299-308, 10p |
| Databáze: | Complementary Index |
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