Comparative study of deposition of thin films by laser-induced PVD with femtosecond and nanosecond laser pulses.
| Autor: | Mueller, F., Mann, Klaus R., Simon, Peter, Bernstein, Jeffrey S., Zaal, Gerard J. |
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| Zdroj: | Proceedings of SPIE; Nov1993, Issue 1, p464-475, 12p |
| Databáze: | Complementary Index |
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