Performance of the Hampshire Instruments Model 5000 proximity x-ray stepper.
| Autor: | Frackoviak, John, Celler, George K., Jurgensen, Charles W., Kola, R. R., Novembre, Anthony E., Trimble, Lee E., Tomes, David N. |
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| Zdroj: | Proceedings of SPIE; Nov1993, Issue 1, p258-272, 15p |
| Databáze: | Complementary Index |
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