Suitability of high-numerical-aperture i-line steppers with oblique illumination for linewidth control in 0.35-m complex circuit patterns.
| Autor: | Templeton, Michael K., Barouch, Eytan, Hollerbach, Uwe, Orszag, Steven A. |
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| Zdroj: | Proceedings of SPIE; Nov1993, Issue 1, p427-437, 11p |
| Databáze: | Complementary Index |
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