Fabrication, alignment, and test of an all-reflective soft x-ray microlithography objective.
| Autor: | Castle, Kenneth R., Ruda, Mitchell C., Gleeson, Timothy M., Tichenor, Daniel A., Bjorkholm, John E., Himel, Marc D., Jewell, Tanya E. |
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| Zdroj: | Proceedings of SPIE; Nov1993, Issue 1, p27-35, 9p |
| Databáze: | Complementary Index |
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