New design for surface micromachined bistable and multistable switches.
| Autor: | Foulds, Ian G., Trinh, Maria T., Hu, Sam, Liao, Steven W., Johnstone, Robert W., Parameswaran, M. Ash |
|---|---|
| Zdroj: | Journal of Micro/Nanolithography, MEMS & MOEMS; Oct2003, Vol. 2 Issue 4, p255-258, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|