Design and characterization of two-axis rotational micromirrors using multi-user microelectromechanical system processes.
| Autor: | Lin, Julianna E., Sharma, Vikas, Michael, Feras S. J., Kirk, Andrew G. |
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| Zdroj: | Journal of Micro/Nanolithography, MEMS & MOEMS; Apr2002, Vol. 1 Issue 1, p70-78, 9p |
| Databáze: | Complementary Index |
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