Metal Organic CVD of Cobalt Thin Films Using Cobalt Tricarbonyl Nitrosyl.
| Autor: | Lane, Penelope A., E.Oliver, Peter, Wright, Peter J., Reeves, Christopher L., Pitt, Anthony D., Cockayne, Brian |
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| Zdroj: | Chemical Vapor Deposition; Oct1998, Vol. 4 Issue 5, p183-186, 4p |
| Databáze: | Complementary Index |
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