The Kinetics and Mechanism of the Pyrolysis of Manganese and Manganese Silicide CVD Precursors.

Autor: Russell, Douglas K., Davidson, Iain M. T., Ellis, Andrew M., Mills, Graham P., Pennington, Mark, Povey, Ian M., Raynor, J. Barrie, Saydam, Sinan
Zdroj: Chemical Vapor Deposition; May1998, Vol. 4 Issue 3, p103-107, 5p
Databáze: Complementary Index
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