Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer.
| Autor: | Garraud, Alexandra, Combette, Philippe, Courteaud, Johann, Giani, Alain |
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| Zdroj: | Micromachines; Mar2011, Vol. 2 Issue 2, p167-178, 12p |
| Databáze: | Complementary Index |
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