A New Reactive Atom Plasma Technology (RAPT) for Precision Machining: the Etching of ULE® Surfaces.
| Autor: | Fanara, C., Shore, P., Nicholls, J.R., Lyford, N., Kelley, J., Carr, J., Sommer, P. |
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| Zdroj: | Advanced Engineering Materials; Oct2006, Vol. 8 Issue 10, p933-939, 7p |
| Databáze: | Complementary Index |
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