Deposition of BaHfO3 Dielectric Layers for Microelectronic Applications by Pulsed Liquid Injection MOCVD.

Autor: Lupina, Grzegorz, Lukosius, Mindaugas, Wenger, Christian, Dudek, Piotr, Kozlowski, Grzegorz, Müssig, Hans-Joachim, Abrutis, Adulfas, Galvelis, Raimondas, Katkus, Tomas, Saltyte, Zita, Kubilius, Virgaudas
Zdroj: Chemical Vapor Deposition; Sep2009, Vol. 15 Issue 7-9, p167-170, 4p
Databáze: Complementary Index
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