ChemInform Abstract: Experimental Study of Diffusion and Interface Segregation of P in an LPCVD Si-Carbon Emitter Structure.
| Autor: | THEUNISSEN, M. J. J., MARTENS, M. C., CLEGG, J. B., ZALM, P. C., VANDENHOUDT, D. E. W. |
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| Zdroj: | ChemInform; Mar1995, Vol. 26 Issue 13, pno-no, 1p |
| Databáze: | Complementary Index |
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