Antiadhesion Surface Treatments of Molds for High-Resolution Unconventional Lithography.
| Autor: | Lee, M. J., Lee, N. Y., Lim, J. R., Kim, J. B., Kim, M., Baik, H. K., Kim, Y. S. |
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| Zdroj: | Advanced Materials; Dec2006, Vol. 18 Issue 23, p3115-3119, 5p |
| Databáze: | Complementary Index |
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