Thermodynamics and kinetics of initial gas phase reactions in chemical vapor deposition of titanium nitride. Theoretical study of TiCl4 ammonolysis.

Autor: Umanskii, Stanislav Ya., Novoselov, Konstantin P., Minushev, Airat Kh., Siodmiak, Magdalena, Frenking, Gernot, Korkin, Anatoli A.
Zdroj: Journal of Computational Chemistry; Oct2001, Vol. 22 Issue 13, p1366-1376, 11p
Databáze: Complementary Index
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