Study on organosilicon positive resist. I. Syntheses and characterization of silsesquioxane, siloxane, and silmethylene polymers with phenolic hydroxy groups.
| Autor: | Sugiyama, Hisashi, Inoue, Takashi, Nate, Kazuo |
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| Zdroj: | Journal of Applied Polymer Science; Mar1992, Vol. 44 Issue 9, p1573-1582, 10p |
| Databáze: | Complementary Index |
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