Application of silicon polymer as positive photosensitive material.
| Autor: | Aoai, Toshiaki, Umehara, Akira, Kamiya, Akihiko, Matsuda, Nobuaki, Aotani, Yoshimasa |
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| Zdroj: | Polymer Engineering & Science; Jul1989, Vol. 29 Issue 13, p887-890, 4p |
| Databáze: | Complementary Index |
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