Radiation-degradation susceptibility studies of vinyl terpolymers: Search for improved electron beam resists.

Autor: Wallace, Easley, Chen, Chi-Yu, Pittman, Charles U., Kwiatkowski, Joe H., Cook, Charles F., Helbert, John N.
Zdroj: Polymer Engineering & Science; Feb1985, Vol. 25 Issue 2, p83-90, 8p
Databáze: Complementary Index
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