A water-soluble, reciprocity-law-failing photoresist.

Autor: Akagi, Motoo, Nonogaki, Saburo, Kohashi, Takahiro, Oba, Yoichi, Oikawa, Mitsuru, Tomita, Yoshifumi
Zdroj: Polymer Engineering & Science; Jun1977, Vol. 17 Issue 6, p353-355, 3p
Databáze: Complementary Index
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