On the Causes and Effects of Contaminations during rf Diode Deposition of Cr-Si Alloys.

Autor: Sobe, G., Schreiber, H., Weise, G., Heinrich, A.
Zdroj: Contributions to Plasma Physics; 1993, Vol. 33 Issue 4, p325-335, 11p
Databáze: Complementary Index
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