Pressure Dependence of the Mean Electron Energy in the Bulk Plasma of an RF Discharge in Argon.
| Autor: | Seeböck, R. J., Köhler, W. E., Römheld, M. |
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| Zdroj: | Contributions to Plasma Physics; 1992, Vol. 32 Issue 6, p613-622, 10p |
| Databáze: | Complementary Index |
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Plný text