COmparison of Some Basic Plasma Parameters and Discharge Characteristics of Planar Magnetron Sputtering Discharges in Argon and Neon.

Autor: Petrov, I., Ivanov, I., Orlinov, V., Kourtev, J.
Zdroj: Contributions to Plasma Physics; 1990, Vol. 30 Issue 2, p223-231, 9p
Databáze: Complementary Index
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