Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System.

Autor: Petrov, I., Orlinov, V., Ivanov, I., Kourtev, J.
Zdroj: Contributions to Plasma Physics; 1988, Vol. 28 Issue 2, p157-167, 11p
Databáze: Complementary Index
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