Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System.
Autor: | Petrov, I., Orlinov, V., Ivanov, I., Kourtev, J. |
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Zdroj: | Contributions to Plasma Physics; 1988, Vol. 28 Issue 2, p157-167, 11p |
Databáze: | Complementary Index |
Externí odkaz: |