Projection x-ray lithography with ultrathin imaging layers and selective electroless metallization.
| Autor: | Calvert, Jeffrey M., Koloski, Tim S., Dressick, Walter J., Dulcey, Charles S., Peckerar, Martin C., Cerrina, Franco, Taylor, James Welch, Doowon Suh, Wood II, O. R., MacDowell, A. A., D'Souza, R. |
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| Zdroj: | Optical Engineering; Oct1993, Vol. 32 Issue 10, p2437-2445, 9p |
| Databáze: | Complementary Index |
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