| Autor: |
D R Boris, R F Fernsler, S G Walton |
| Předmět: |
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| Zdroj: |
Plasma Sources Science & Technology; Apr2011, Vol. 20 Issue 2, p025003-025003, 1p |
| Abstrakt: |
We present a novel plasma diagnostic for measuring local plasma density in reactive-gas plasmas, and depositing plasmas. The diagnostic uses a network analyzer to measure the LC resonance (LCR) frequency of a parallel plate capacitor with inductive leads. The location of the LCR (oR) in frequency space is then used as a measure of the plasma dielectric constant [?] p between the plates. By properly constructing the LCR probe, oR can be tuned such that oR [?] oce, where oce is the electron-cyclotron frequency. Thus, the probe can be used in plasmas with varying degrees of magnetization while avoiding complications introduced to [?] p when o is comparable to oce. Density measurements from the LCR probe are compared with Langmuir probe measurements in an electron-beam generated plasma in which density varied from 109 to 1011 cm[?]3. An axial magnetic field, typically used to confine the electron beam, was varied between 0 to 300 G. The LCR probe showed good agreement with a Langmuir probe across the entire range of magnetic fields. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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