Growth of GaN/AlGaN on 200 mm diameter silicon (111) wafers by MOCVD.

Autor: Boyd, Adam R., Degroote, Stefan, Leys, Maarten, Schulte, Frank, Rockenfeller, Olaf, Luenenbuerger, Markus, Germain, Marianne, Kaeppeler, Johannes, Heuken, Michael
Zdroj: Physica Status Solidi (C); Jun2009 Supplement, Vol. 6, pS1045-S1048, 4p
Databáze: Complementary Index