Measurements of Porous Networks in Low-k Dielectric by Three-dimensional Electron Tomography.
| Autor: | Ercius, P, Xin, HL, Muller, DA |
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| Zdroj: | Microscopy & Microanalysis; Jul2009 Supplement 2, Vol. 15 Issue S2, p1240-1241, 2p |
| Abstrakt: | Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009 [ABSTRACT FROM PUBLISHER] |
| Databáze: | Complementary Index |
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