| Autor: |
Miyamoto, N., Demura, Y., Imakita, S., Kasuya, T., Vasquez, M. R., Wada, M. |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings; 1/7/2011, Vol. 1321 Issue 1, p448-451, 4p |
| Abstrakt: |
A compact ion source with 14 mm diameter, 30 mm long discharge region was developed. A total size of the ion source including the beam extraction system was 60 mm in diameter and 160 mm in length. A high temperature coaxial cathode consisting of thin-wall tantalum and tungsten tubes produced a discharge plasma. A source gas was supplied through the inner W tube of the coaxial cathode. A stable plasma of H2 was maintained with the discharge current of 2.0 A at 68 A cathode heating current. The optimum H2 gas pressure for ion beam extraction was 2×10-2 Pa. Hydrogen ion beam current was 120 μA (1 mA/cm2) at 2.0 A discharge current and 3.0 kV extraction voltage. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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