Temperature and density measurements for pulsed plasmas using spectroscopy methods.

Autor: Restrepo, Elisabeth, Ramı´rez, Wilder, Devia, Alfonso
Předmět:
Zdroj: AIP Conference Proceedings; 2001, Vol. 559 Issue 1, p211, 5p
Abstrakt: In this work we show an experimental study of plasmas generated by a pulsed discharge in order to produce hard coatings of TiN. Optical spectroscopy techniques were used to study the emission characteristics of the plasma. A methodology as been applied that relates the intensity of different emission lines, to calculate the excitation temperature. In both cases one o most obtain integral over each line profile. The Stark broadening was measured by determining the FWMH of the line profile and subtracting the instrumental broadening, the line shapes obtained show a mostly Lorentzian profile and thus, Doppler broadening may be neglected. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index