| Autor: |
Matsuyama, Hideo, Koike, Kazuyuki |
| Zdroj: |
Journal of Electron Microscopy; Jun1994, Vol. 43 Issue 3, p157-163, 7p |
| Abstrakt: |
A high-spatial-resolution spin-polarized scanning electron microscope (spin SEM) for observing magnetic domains has been developed. We have used a thermal-assisted field emission gun to provide a high, stable emission current In addition, we have developed an objective lens whose conical shape accommodates a short working distance and enables a secondary electron collector to be placed close to the sample to collect most of the secondary electrons. Included in this system are a newly developed high-efficiency Mott detector, a low-loss secondary-electron collector, and transport optics. As a result, 20-nm resolution has been achieved. [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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