| Autor: |
TSUNO, Katsushige, HARADA, Yoshiyasu |
| Zdroj: |
Journal of Electron Microscopy; Oct1983, Vol. 32 Issue 4, p289-298, 10p |
| Abstrakt: |
A flow diagram for producing and testing high resolution electron microscope lenses is described. The process consists of three stages: (1) simulatIon of axial field distributions of the electron lens using the finite element method, and numerical calculation of optical properties using calculated axial field distributions, (2) measurement of axial field distributions and calculation of optical properties, and (3) direct measurement of optical properties from microscope images. Calculated and measured results are compared and found to agree. A new lens designed by using the above process shows a small spherical aberration coefficient (0.8 mm) at 200 kV. [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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