Autor: |
Miranda, M., Dorrío, B. V. |
Předmět: |
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Zdroj: |
AIP Conference Proceedings; 4/15/2010, Vol. 1236 Issue 1, p369-374, 6p |
Abstrakt: |
Many metrological applications require a measurement associated to the phase between two patterns. This can be directly recovered with differential phase shifting algorithms (DPSAs) combining, in a non-linear way for example, known phase shifting algorithms (PSAs). In previous works we have studied the response of several families of DPSAs to the main error sources by using numerical simulation, a linear approach and a Fourier description of the differential process. Here we present an error analysis using the Monte Carlo simulation method to characterise the systematic and random sensitivities in a family of DPSAs. [ABSTRACT FROM AUTHOR] |
Databáze: |
Complementary Index |
Externí odkaz: |
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