RF extraction method for source/drain overlap and depletion length of deep-submicron RF MOSFETs using intrinsic gate-bulk capacitance.

Autor: Kim, J.-Y., Ko, B.-H., Choi, M.-K., Lee, S.
Předmět:
Zdroj: Electronics Letters (Institution of Engineering & Technology); 11/11/2010, Vol. 46 Issue 23, p1566-1568, 3p, 1 Diagram, 3 Graphs
Abstrakt: The source/drain overlap and depletion length in deep-submicron RF multifinger MOSFETs is accurately determined by a new RF method based on the direct extraction of the extrinsic gate-bulk capacitance using S-parameters biased at VGS > VTH and VDS = 0V. This RF method is proposed to remove the serious error of a conventional C-V method due to the influence of the extrinsic capacitance. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index