Advanced thin-film silicon-on-sapphire technology: Microwave...

Autor: Johnson, Robb A., de la Houssaye, Paul R., Chang, Charles E., Chen, Pin-Fan, Wood, Michael E., Garcia, Graham A., Lagnado, Isaac, Asbeck, Peter M.
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Zdroj: IEEE Transactions on Electron Devices; May98, Vol. 45 Issue 5, p1047, 8p, 3 Black and White Photographs, 3 Diagrams, 3 Charts, 8 Graphs
Abstrakt: Analyzes the prospects of thin-film silicon-on-sapphire (TFSOS) complementary metal oxide semiconductors (CMOS) technology in microwave applications. Technology characteristics; Fabrication of basic building blocks to explore the potential of the devices in microwave circuits; Conclusion.
Databáze: Complementary Index