| Autor: |
Fletcher, Daniel A., Crozier, Kenneth B., Guarini, Kathryn W., Minne, Stephen C., Kino, Gordon S., Quate, Calvin F., Goodson, Kenneth E. |
| Předmět: |
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| Zdroj: |
Journal of Microelectromechanical Systems; Sep2001, Vol. 10 Issue 3, p450, 10p, 15 Black and White Photographs, 18 Diagrams, 3 Graphs |
| Abstrakt: |
Presents the fabrication of a solid immersion lens from silicon for scanning near-field optical microscopy. Atomic force microscopy; Microelecromechanical devices; Micromatching; Microscopy; Optical imaging. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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