| Autor: |
Orlinov, V., Goranchev, B., Kourtev, J. |
| Předmět: |
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| Zdroj: |
International Journal of Electronics; Apr74, Vol. 36 Issue 4, p431, 9p, 1 Chart, 3 Graphs |
| Abstrakt: |
An experimental investigation of the dependence of cathode sputtering rate W on discharge current I has been carried out in a wide range of changes of abnormal ratio I/I (in the different measurements I/I = 1.6-37), where I is the current at which the discharge passes from normal to abnormal conditions. The measurements have been made with three experimental devices with iron cathodes and the gas filling a Penning mixture 99% Ne + 1% Ar. The pressure p in the devices was changed in the interval of p = 3-25.5 Torr. It is shown that in such a wide range of changes of I/I the dependence W(I) is no longer a power function. However, for convenient practical I use of this dependence and for comparison with results of previous investigations, a good approach for this is the division of the range of changes of current I into two regions. In coach of these regions the dependence W(I) ratty be well approximated by a power function W ~ I but with different values of power index m for both region. A good agreement between the calculated and the experimental values of m for both regions of approximation is obtained. An explanation of the reasons which cause the change of m. when I/I is changed, has been proposed. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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