| Autor: |
Chuan Pu, Sangtae Park, Chu, P.B., Shi-Sheng Lee, Ming Tsai, Peale, D., Bonadeo, N.H., Brener, I. |
| Zdroj: |
IEEE Journal of Selected Topics in Quantum Electronics; May/Jun2004, Vol. 10 Issue 3, p472-477, 6p |
| Abstrakt: |
We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spring-softening effect commonly found in electrostatic actuation, where the mirror resonance frequency decreases with increased tilt angle, is significantly reduced. Sidewall actuation enables superior performance of 3-D MEMS mirrors including large pull-in angles, reduced actuation voltages, improved device reliability, and fast switching times. [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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