Vertical metrology using scanning-probe microscopes: Imaging distortions and measurement repeatabily

Autor: Edwards, Hal, McGlothlin, Rudye, U, Elisa
Předmět:
Zdroj: Journal of Applied Physics; 4/15/1998, Vol. 83 Issue 8, p3952, 20p, 28 Black and White Photographs, 4 Diagrams, 11 Charts, 12 Graphs
Abstrakt: Provides information on an experimental study describing the repeatability of step-height measurements using scanning-probe microscope (SPM) imaging. Methodology used to conduct the experiment; Information on step-transition effects; Indepth look at common methods to estimate step heights from SPM images.
Databáze: Complementary Index