| Autor: |
Frolov, V., Gerasimenko, V., Kononenko, V., Pimenov, S., Khomich, A., Kovalev, V., Kirpilenko, G., Shelukhin, E. |
| Zdroj: |
Nanotechnologies in Russia; Jun2009, Vol. 4 Issue 5/6, p366-372, 7p |
| Abstrakt: |
Scanning probe microscopy, spectroscopic ellipsometry, local reflection spectroscopy, and Raman spectrometry were used to determine the correlation between the optical and structural properties of amorphous carbon-silicon a-C:H:Si films and to study the role of the atomic structure during the formation of conical nanoobjects under an electric field in a scanning probe microscope (SPM) lithograph. Based on an analysis of the experimental data, it was shown that films in the initial state are distinguished by a high disorder of the cluster structure. The film material is restructured during the SPM exposure, which is accompanied by the formation of the sp 3 -bound atomic structure and nanostructuring of the sp2-bound carbon; in this case, the refractive index decreases by a factor of ∼0.6. The latter is explained by the presence of voids in the modified material. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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