| Autor: |
Hirano, Keiji, Okamura, Junji, Taira, Tsutomu, Sano, Kunio, Toyoda, Arata, Ikeda, Mitsuaki |
| Předmět: |
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| Zdroj: |
IEEE Transactions on Semiconductor Manufacturing; Aug2001, Vol. 14 Issue 3, p202, 5p, 6 Black and White Photographs, 3 Diagrams, 5 Charts, 3 Graphs |
| Abstrakt: |
Examines the tetramethylammoniumhydroxide wastewater treatment technique from catalytic oxidation. Application of the technique on amines; Running cost of the treatment system; Characteristics of the catalytic oxidation. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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