Fabrication of Two-Layer Thin-Film Magnetic-Field Microprobes on Freestanding SU-8 Photoepoxy.
| Autor: | Reck, James N., Kuifeng Hu, Shaohua Li, Haixiao Weng, Beetner, Daryl G., O'Keefe, Matthew J., Ramsay, Darlene S., Drewniak, James L. |
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| Zdroj: | IEEE Transactions on Device & Materials Reliability; Mar2010, Vol. 10 Issue 1, p26-32, 7p |
| Databáze: | Complementary Index |
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